Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers

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Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers

The interplay between optical performance and the thermally activated interface chemistry of periodic Mg/SiC multilayers designed for application at 30.4 nm are investigated by optical (hard x-ray, soft x-ray and ultraviolet ranges, i.e. from 0.154 to 30.4 nm) reflectivity and x-ray emission spectroscopy. The multilayers are prepared by magnetron sputtering and then annealed up to a temperature...

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ژورنال

عنوان ژورنال: The European Physical Journal B

سال: 2008

ISSN: 1434-6028,1434-6036

DOI: 10.1140/epjb/e2008-00290-x